Fast time resolved techniques as key to the understanding of energy and particle transport in HPPMS-plasmas
Christian Maszl, Wolfgang Breilmann, Lars Berscheid, Jan Benedikt, Achim von Keudell
FFast time resolved techniques as key to the understanding of energy and particle transport in HPPMS-plasmas
C. Maszl, W. Breilmann, L. Berscheid, J. Benedikt and A. von Keudell
Fig. 1a) Contour plot of the ion energy distribution function (IEDF) of ³ Ar¹ . The color depicts the flux in arbitrary units. The discharge current is ⁶ ⁺ overlaid in light green and the voltage pulse in light blue. The respective axis can be found on the right-hand side. b) Spatio-temporal diagram for an Ar I line (760 nm). The z-axis starts at the top of the magnetron and ends at the orifice of the EQP. The intensities were extracted at the symmetry axis of the magnetron with a time resolution of 2 μs. The colors are photon counts in arbitrary units. All color scales are linear. The different labels (I)-(V) are explained in the text.Manuscript received X month 2013; revised X month 2014.C. Maszl, W. Breilmann, L. Berscheid, J. Benedikt and A. von Keudell are with the Research Department Plasmas with Complex Interactions, Ruhr-University Bochum, Institute for Experimental Physics II, D-44780 Bochum, GermanyThis project is supported by the DFG within the framework of the Coordinated Research Center SFB-TR 87 and the Research Department “Plasmas with Complex Interactions” at Ruhr-University Bochum.Publisher Identifier S XXXX-XXXXXXX-X bstract – High power pulsed magnetron sputtering(HPPMS) plasmas are pulsed discharges where the plasmacomposition as well as the fluxes and energies of ions arechanging during the pulse. The time resolved energydistribution for Ar¹ ions was measured and Phase Resolved ⁺ Optical Emission Spectroscopy (PROES) for the Ar I line at760 nm was done to get more insight in the transportproperties of the plasma forming noble gas. Thesemeasurements were performed during HPPMS of titaniumwith argon at 0.5 Pa. The peak power density during the50 μs pulses was 1.8 kW/cm². In this contribution wedemonstrate how time resolved mass spectrometry andICCD cameras can be used to shed more light on energy andparticle transport in HPPMS-plasmas.