Integrated Inertial Measurement Unit

Abstract

With the more advanced pitch and roll gyroscope designs and microfabrication platform, achieving consistent high performance in all three axes using robust high-frequency resonant MEMS gyroscopes becomes possible. This chapter presents the first demonstration of a high-performance timing and inertial measurement unit (TIMU) with robust 3-axis resonant gyroscopes integrated and wafer-level packaged (WLP) on a single chip. Each of the integrated sensing elements on the TIMU demonstrated high performance with small form factor and high robustness, showing great potentials for navigational applications.