Microstructure and adhesion of MeN/TiSiN (Me = Ti, Cr, Zr, Mo, NbxAl1−x) multilayered coatings deposited by cathodic arc ion plating

Abstract

Abstract To increase the adhesion and reduce the coefficient of friction (COF), two key factors to determine the performance of a coating, MeN (Me\u202f=\u202fTi, Cr, Zr, Mo, NbxAl1−x) coating have been incorporated in TiSiN coating formed nano-amorphous composite multilayered coatings. MeN/TiSiN (Me\u202f=\u202fTi, Cr, Zr, Mo, NbxAl1−x) coatings were deposited by cathodic arc ion plating using alloy targets with fixed parameters. The microstructure was investigated by X-ray diffraction (XRD) and high resolution Transmission Electron Microscopy (HRTEM) and revealed nano-composite multilayer structure with clear interface. The cross-sectional morphologies and surface roughness have been revealed by scanning electron microscopy and surface profilometer. MoN/TiSiN and CrN/TiSiN coating possessed the smoothest and most coarse surface which resulted from particles and pores. The COF and adhesion were evaluated by ball-on-disk tester and scratch test, respectively. Multilayered TiSiN coatings revealed excellent adhesion (with critic load higher than 70\u202fN) and relative lower COF (ranged from 0.3 to 0.58). CrN/TiSiN revealed the highest hardness of 32.5\u202fGPa and the largest critic load of 114.3\u202fN while MoN/TiSiN revealed the lowest COF of 0.32.