Applied Surface Science | 2021

High field-effect performance and intrinsic scattering in the two-dimensional MoS2 semiconductors

 
 
 
 
 
 
 
 
 
 
 

Abstract


Abstract The mobility of MoS2 nanosheets plays an important role in the application of nanoelectronics. The two-dimensional (2D) MoS2 semiconductors have been investigated while the reported mobility varies enormously. We adopt a standard four-terminal electrical measurement and eliminate any contact contributions. We fabricated several tens of field-effect transistors (FETs) with MoS2 nanosheets exfoliated from the same MoS2 bulk. The MoS2 FETs can be grouped into either high- or low-mobility devices according to their temperature behaviors of mobilities. With an RT mobility higher than\xa0~\xa025 or\xa0~\xa030 cm2V-1s−1, the MoS2 FETs exhibit an increasing mobility with decreasing temperature, implying phonon scattering in these high-mobility (HM) devices. The HM devices are accompanied with metallic states and their conductivities close to\xa0~\xa01 e2/h. A low specific contact resistivity of\xa0~\xa0450\xa0Ω·μm is observed in these HM devices. In contrast, the MoS2 FETs with an RT mobility lower than\xa0~\xa030 or\xa0~\xa035 cm2V-1s−1, categorized as low-mobility (LM) devices, reveal a decreasing mobility with decreasing temperature. These LM devices show an insulating state, carriers suffering from impurity scattering, and a high contact resistance. Their temperature dependent resistances are highly concordant with the 2D Mott’s variable range hopping. These observations corroborate a large variation of intrinsic disorders in MoS2 nanosheets.

Volume 564
Pages 150422
DOI 10.1016/J.APSUSC.2021.150422
Language English
Journal Applied Surface Science

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