Low temperature formation of copper rich silicides

Abstract

Abstract The reactions of copper and amorphous silicon were studied by in-situ transmission electron microscopy up to 500\u202f°C. Only the Cu76Si24-η phase and the Cu82Si18-δ phase formed at this temperature. The crystal structure of the dominating Cu76Si24 changed, by the elapsed time after heating. The Cu Si ordering resulted in different supercells, built up by topologically identical subcells with different site occupancies and arrangement. Two modulated crystal structures were solved based on diffraction data and HRTEM images.