Journal of Alloys and Compounds | 2019
Comparison of microstructures and magnetic properties in FePt alloy films deposited by direct current magnetron sputtering and high power impulse magnetron sputtering
Abstract Single-layered FePt films of 30\u202fnm thickness with random orientation are produced by direct current magnetron sputtering (DCMS) deposited directly onto Corning 1737 glass substrates and then post-annealed at 700\u202f°C for 30\u202fmin. In films produced by high power impulse magnetron sputtering (HiPIMS) however, a strong (001) texture of L10 FePt film with isolated island structure is achieved and presents high perpendicular magnetic anisotropy after post-annealing under the same conditions. This is due to the compressive stress in as-deposited FePt films being enhanced greatly by HiPIMS. The films achieved by HiPIMS possess perpendicular coercivity, saturation magnetization and perpendicular squareness of 14.2\u202fkOe, 620 emu/cm3 and 0.98, respectively, which reveal HiPIMS as a good technique to produce single-layered FePt films with high perpendicular magnetic properties.