Deposition and optimization of piezoelectric zinc oxide-layer using sol-gel technique for MEMS acoustic sensor

Abstract

Abstract In this paper, ZnO-layer is deposited and optimized using sol–gel technique for piezoelectricity. The optimized piezoelectric ZnO layer is useful in the development of MEMS Acoustic Sensor and similar applications. In ZnO layer deposition, a solution was prepared using precursor [Zinc Acetate Dihydrate (ZAD)] and binder [Monoethanolamine (MEA)] with different solvents [ethanol and n-propanl]. The deposited samples were annealed at 600◦ C to obtain the piezoelectricity of the layer. The technological development is supported by characterization of samples using Dektak 6\xa0M surface profiler and XRD studies of ZnO film. This paper discusses the effects of solvents and substrate materials with respect to the thickness and crystal structure of deposited piezoelectric ZnO film.