Overview and analysis of MEMS Coriolis vibratory ring gyroscope

Abstract

Abstract Micro-electromechanical systems (MEMS) Coriolis vibratory ring gyroscope, which utilizes Byran effect to detect rotation, is regarded as a two-dimensional derivative of vibrating shell gyroscope. The MEMS ring gyroscope has a symmetrical structure, higher mechanical sensitivity, better shock resistance and lower temperature sensitivity. Therefore, the ring gyroscope considered as candidates for high-performance MEMS gyroscopes. Moreover, ring resonator preparation is compatible with the recent popular MEMS process technology, which has a higher CSWaP (cost, size, weight, and power) advantage. This paper analyses the progress of research into the MEMS ring gyroscopes. Firstly, working mechanism and different detection methods are introduced; secondly, process techniques and materials are reviewed; thirdly, structural styles of the ring resonators are reported; fourthly, characteristics of the ring resonators are analysed; fifthly, error suppression and performance improvement strategies of the ring gyroscopes are investigated; and finally, some viewpoints and prospects of the MEMS ring gyroscopes are presented.