Characterization of micro grinding tools using optical profilometry

Abstract

Abstract This article presents a method to characterize electroless plated micro grinding tools using an optical measuring device. Abbott Firestone curve characteristics, such as height distribution, void volume, and material volume obtained from topography measurements, were used to define “volume ratio.” This parameter distinguishes the micro grinding tools according to their planar grit density. As a result, micro grinding tools can be classified in a manner similar to conventional grinding wheels.