Molybdenum/tungsten disulfide solid solutions nanoparticles formation by aerosol-assisted CVD

Abstract

Abstract A technology has been developed for the formation of nanoparticles of molybdenum and tungsten disulfides solid solutions by aerosol assisted chemical deposition from the gas phase. Unlike conventional methods of such solid solutions formation by oxides sulfurization methods, this technology allows to obtain nanoparticles in a gas flow with a high speed and the ability to control the composition and particle size. Single-source precursors ammonium thiomolybdate and thiotungstate are used, their ratio defines metals ratio in nanoparticles. Particles size control is avaliable via concentration variation of initial solution. It was experimentally shown with TEM, XRD and Raman spectroscopy that nanoparticles are true solid solutions. Metal atoms are uniformly distributed between sulfur layers.