Mechanical performance of indium zinc oxide films deposited on coating-treated PMMA substrates

Abstract

Abstract Three types of primer layers, including polyurethane (PU), acrylic, and silicone coatings, were developed and deposited on the poly(methylmethacrylate) (PMMA) substrates. Amorphous transparent indium zinc oxide (IZO) films deposited by direct current magnetron sputtering at room temperature on primer-treated and untreated PMMA substrates were investigated ex situ in terms of surface morphology, adhesion, nanoindentation and electrical properties. AFM images show that the microstructure of IZO films was determined by the morphology of the primer layers. IZO films deposited on silicone and acrylic-treated PMMA substrates presented the least surface roughness, which proved that the silicone and acrylic primer layers were more effective to get a dense surface. Nano-scratch tests indicated that the adhesion of IZO films deposited on substrate treated by silicone-based primer layers was superior to that on PU-treated and untreated substrate, which can be attributed to the better mechanical matches of the IZO/primer/PMMA system and the large values of hardness of the silicone primer, which can counterbalance the indentation load and prevent the failure of the films.