Thin Solid Films | 2021
Anisotropic properties of oblique angle deposited permalloy thin films
Abstract
Abstract The structural, transport, and magnetic properties of permalloy (Ni81Fe19) thin films prepared by oblique angle deposition have been investigated. With the increasing oblique angle, column-like microstructures developed on the films while their porosity augmented. Due to the unique columnar microstructures, a deposition-angle-dependent uniaxial anisotropy was induced in the films. While the normally deposited film was electrically isotropic, the films grown at non-zero angles showed enhanced anisotropic conduction. The magnetization data showed that for the films deposited at angles 70°). The experimental results demonstrated that oblique angle deposition, particularly at angles > 70°, can substantially transform the electro-magnetic properties of thin films.