An experimental test-stand for investigation of electron-beam synthesis of dielectric coatings in medium vacuum pressure range

Abstract

Abstract We describe the design and characteristics of an experimental and diagnostic test-stand for investigating the processes of electron-beam evaporation and dielectric coating synthesis in medium vacuum (1–100\u202fPa) pressure range. The test-stand is equipped with a forevacuum plasma-cathode electron beam gun based on a hollow-cathode plasma discharge, a mass-to-charge plasma diagnostic system employing a modified RGA-100 and an RGA-300 quadrupole mass analysers, an optical pyrometer, and probe-based beam-plasma diagnostic devices. We discuss the prospects for applying this experimental/diagnostic test-stand for broad studies of electron-beam evaporation of metallic or dielectric targets and deposition of ceramic and boride coatings.