Strategies for Multimodal Analysis of Joint EELS and EDS Data

Abstract

The complementary nature of electron energy-loss spectroscopy (EELS) and energy dispersive [x-ray] spectroscopy (EDS) signals makes it highly desirable to acquire both during electron microscopy investigations of materials. With ongoing improvements in instrumentation and detectors, it is now common to acquire joint EELS-EDS spectrum image data for materials analysis, all the way from large area mapping down to atomic scale analysis. Having all data types on a single platform opens new avenues for data analysis and interpretation.