Non-linear effects and electron heating dynamics in radio-frequency capacitively coupled plasmas with a non-uniform transverse magnetic field

Abstract

A non-uniform transverse magnetic field is used to increase the plasma density and create an asymmetry in radio frequency capacitively coupled plasmas for plasma sputtering and plasma vapor deposition. Based on one-dimensional particle-in-cell/Monte Carlo collision simulations, the effect of the magnetic field magnitude on the non-linear behavior and the electron heating dynamics is studied for a pure helium plasma at a pressure of 30 mTorr. The results show that increasing the magnetic field magnitude can generate a more positive DC self-bias. As a result, non-linear oscillations of the electron current density and the electric field close to the grounded electrode are enhanced. An electric field reversal is induced when the powered electrode sheath collapses to balance electron and ion fluxes toward this boundary due to the strong confinement of electrons. Anomalous energetic electron beams are observed propagating from the collapsed sheath toward the plasma bulk. It is shown that such beams are reflections of the beams originating from the opposite expanding sheath based on the analysis of single particle motions. We show that energetic electron beams can be reflected by the transverse magnetic field.