MEMS meander harvester with tungsten proof-mass

Abstract

Using current battery technology the life-time of a leadless pacemaker is approximately 6-10 years, with a large portion of the pacemaker occupied by the battery. This paper investigates the possibility to use a MEMS piezoelectric harvester as a complementary energy source in leadless pacemakers. The challenge is to combine the low resonance frequency required to harvest energy from a heartbeat with the small volume of 20×4×3 mm3 available, with the corresponding harvester displacement restricted to 2 mm. Due to the displacement restriction the selected structure was a double clamped bridge in order to reduce the mass displacement, with various meander-type designs simulated to reduce resonance frequency. To further reduce resonance frequency large proof-masses of tungsten were attached by gluing. Two types of tungsten proof-masses were added to four different harvesters, 16.4 mg and 16.6 mg on sample 1 and 2 and 502 mg and 492 mg proof-mass on sample 3 and 4. The structures have 2 μm patterned PZT (deposited by sol-gel technique) and Pt metal electrodes for d31 mode harvesting. The power output measured from one of the two PZT/electrodes was 0.13 nW with 50 μm deflection at 100 k Ω optimal load resistance and 9.1 mVpp at 232 Hz.