Plasma – Assisted Growth of MnO2 Nanostructures for Sensing Application

Abstract

The limited research based on the prepare of a MnO2 gas sensor on silicon and the testing of its sensitivity to targeted gases such as the CO2 gas adopted in this work has led us to prepare and prepare such important sensors in human daily life. Initially, three different co2 concentrations were selected: (1.49ppm, 5.8ppm, 21.8ppm) we found that the best allergic (S = 98.28) was from the focus share (21.8ppm). This focus was worked and we also studied the amount of allergic to different temperatures 50.10° and the response time and recovery time were set for both thermal degrees, the best sensitivity was (97.22) for the sensitivity of the gas manufactured from porous silicon at a temperature (100°) C) With a short response time of (10.21sec) and a shorter recovery time at (9.1sec) all this work after the thin membrane was deposited on a slice of porous silicon type n and performed visual tests represented by UV-vis that showed that emissions occurred in the region Ultraviolet close to the electromagnetic spectrum and the optical energy gap was identified using this technique was equivalent to 3.88eV. The photosynthesis technology showed a clear peak at 324nm wavelength. There was a significant convergence in the amount of the optical energy gap calculated by this technique of 3.73nm compared to the value of the optical power gap resulting from UV-vis, which was equal to 3.88eV. The results of the Raman spectroscopy test confirmed the acquisition of the thin four-angle MnO2 membranes resulting from the vibration of one type of atoms, as the displacement of Raman appeared at the highest intensity corresponding to the wavenumber of these thin membranes 512cm-1. The synthetic examinations represented by both the atomic force microscope for the study of the topography of the thin membrane recorded proved that the thin membrane is characterized by high roughness and granular vertical growth, and the square root of the square of the average roughness square has been calculated, granular volume rate 30.68nm, deviation 6.768nm, increase in surface area 4.446nm, surface thickness 46.78nm and this large surface roughness of the membrane surface has increased the sensitivity of the gas sensor. Then came the role of using FESEM technicians, the results of which came after the tests that the membrane is characterized by the dense random and compressed distribution of semi-spherical nanoparticles and a nanosize rate of about 33.58nm using ImageJ. Finally, the pattern of x-ray diffraction that the membrane formed with a quadruple-angle, monolithic and high-crystallization composition, the degree of crystallization was 70.25, and the granular size was found according to Shearer’s image from the pattern data of the pattern of the dehydration has been calculated and is equivalent to 31.81nm.