IEEE Access | 2019
Amorphous MgInO Ultraviolet Solar-Blind Photodetectors
Abstract
The magnesium oxide is one of the promising candidate’s materials that can act as solar blind photodetectors. However, the intrinsically low thermal conductivity of MgO, which is restrict the application in electric device. The magnesium oxide exhibits the poor conductivity which could improved by doing method. This paper fabricated magnesium indium oxide (MgInO) solar-blind photodetectors by doping indium oxide with magnesium oxide through co-sputtering deposition method. The photodetector comprises a bottom glass substrate, an MgInO thin film, and an interdigitated gold electrode to complete the metal–semiconductor–metal structure of the solar-blind photodetector. The experimental results indicate that the photo-to-dark-current ratio is <inline-formula> <tex-math notation= LaTeX >$1.4\\times 10^{4}$ </tex-math></inline-formula>, and the responsivity is 1.47 A/W when a reverse bias voltage of 2 V is applied. Furthermore, the noise equivalent power and detectivity are <inline-formula> <tex-math notation= LaTeX >$7.77\\times 10^{-11}$ </tex-math></inline-formula> W and <inline-formula> <tex-math notation= LaTeX >$1.75\\times 10^{11}$ </tex-math></inline-formula> cm H <inline-formula> <tex-math notation= LaTeX >$^{0.5}\\,\\,\\text{W}^{-1}$ </tex-math></inline-formula> with a 2 V bias voltage, respectively.