Out-Of-Control Detection In Semiconductor Manufacturing using One-Class Support Vector Machines

Abstract

Semiconductor manufacturing is a continuously challenging and competitive industry. It is important to detect any anomalies in the production facilities, or fabs, as they occur to avoid defect accumulations and loss of performance. In this paper we present a literature review of classification methods and detailed the chosen method which is One Class-Support Vector Machine (OC-SVM). This method is used for out-of-control detection in semiconductor manufacturing. The method is tested via an application using industrial data of the studied fab.