2019 China Semiconductor Technology International Conference (CSTIC) | 2019

Tube Length Effect of Anodized Aluminum Oxide Template Based Gas Sensor

 
 
 
 

Abstract


Anodic aluminum oxide (AAO) template based gas sensor, is often used due to its large surface reaction area. With longer AAO tube, the effective reaction surface area is widely believed to further increase leading to a higher sensitivity. However, through 3D current density distribution figures generated from the simulation software, a more uniform distribution is found to form at the center of the tube area instead of only top surface, making the tube area more effective for the reaction. This double effect of tube length is thus believed to contribute to the improved sensitivity of AAO template based gas sensor.

Volume None
Pages 1-4
DOI 10.1109/CSTIC.2019.8755669
Language English
Journal 2019 China Semiconductor Technology International Conference (CSTIC)

Full Text