2019 Electron Devices Technology and Manufacturing Conference (EDTM) | 2019
Synthesis of nitrogen-doped multilayer graphene film by solid-phase deposition using Co-N catalyst
Abstract
A new process using a Co-N catalyst has been developed to perform doping simultaneously with film formation in solid phase deposition method (SPD) which does not require transfer of multilayer graphene (MLG). Nitrogen doping into MLG was confirmed by XPS and UPS and succeeded in reducing sheet resistance by about 36%.