Vibration Measurement and Visualization in Semiconductor AMHS on the basis of IoT

Abstract

In this paper, we present an approach to automate a legacy measurement device used for offline vibration measurement within automated material handling systems (AMHS) of semiconductor manufacturing plants by using a modern, state of the art IoT framework. After outlining the drawbacks of the existing, time-consuming procedure of offline measurement, the decision of automating the device using the IoT is explained and the necessary steps and framework services are introduced. Finally, the results and benefits of using an IoT framework as well as the new, automated workflow are documented.