IEEE Sensors Journal | 2021

A Study on MoS₂ Nanolayer Coated Etched Fiber Bragg Grating Strain Sensor

 
 
 
 

Abstract


In this paper, we report on the comprehensive study on Molybdenum disulfide (MoS<sub>2</sub>) nanolayer coated etched Fiber Bragg Grating (eFBG) strain sensor. MoS<sub>2</sub> nanolayer is coated using Physical Vapor Deposition (PVD) of Molybdenum (Mo) on eFBGs followed by sulfurization of the same in an inert atmosphere at 450° C. Such coating technique provides a direct control over the coating thickness of MoS<sub>2</sub>, thereby enabling a study based on the effect of nanolayer coating thickness on the intrinsic strain sensitivity as well as the power of the back reflected Bragg wavelength of eFBG in the 0.78eV spectral region. High uniformity of MoS<sub>2</sub> nanolayer coating ensures consistent, repeatable and highly linear FBG strain sensors with a correlation coefficient of 0.988 in the range of 0 to <inline-formula> <tex-math notation= LaTeX >$2500~\\mu \\varepsilon $ </tex-math></inline-formula>. A maximum intrinsic strain sensitivity of ~6.65 pm/<inline-formula> <tex-math notation= LaTeX >$\\mu \\varepsilon $ </tex-math></inline-formula> with a resolution of <inline-formula> <tex-math notation= LaTeX >$\\sim 150~\\text{n}\\varepsilon $ </tex-math></inline-formula> have been achieved with optimized MoS<sub>2</sub> coated eFBG sensors. This kind of consistent, highly sensitive and linear strain sensors when incorporated with proper packaging schemes can be particularly useful for applications demanding high sensitivity of FBG sensors such detection of seismic vibrations, underwater acoustic signals, low amplitude accelerations, etc.

Volume 21
Pages 9171-9178
DOI 10.1109/JSEN.2021.3054473
Language English
Journal IEEE Sensors Journal

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