Heart Sound Monitoring Based on a Piezoelectric Mems Acoustic Sensor

Abstract

In this paper we propose a heart sound monitoring device which consists of a piezoelectric MEMS acoustic sensor, a low noise amplification circuit, and silicone polymers with an air-cavity. The piezoelectric MEMS acoustic sensor is composed of a 6by7 aluminum nitride (AlN) membrane array. We verify the potential of the proposed device to diagnose heart diseases by using six different types of simulated heart sounds. Furthermore, the heart sound of a healthy human subject at rest and after exercise, with and without noise are also tested. Both the S1 and S2 sounds of the heart are easy to recognize according to the measured waveforms, indicating that the proposed device has the potential of fitness monitoring and heart disease diagnosis.