2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) | 2021
A Novel Low-Temperature Post-Curing Transfer Method Of Graphene Wrinkling Surface For Strain Engineering
Abstract
Strain engineering has attracted great interest for being regarded as a straightforward and universal approach to tune the intrinsic properties of two-dimensional (2D) materials and improve the performances of nanodevices from 2D materials. We proposed a novel low-temperature post-curing transfer method to fabricate mono-scale conformal wrinkles to apply strains on graphene membranes. Because the low-temperature post-curing process not only ensures sufficient interface adhesion strength, but also avoids diffusion-induced gradient interface, mono-scale conformal graphene wrinkle patterns are triggered. Mechanical bending-induced cracks are introduced to make wrinkles align in one-dimensional (1D) order. The mono-scale graphene wrinkles can be used for strain engineering of 2D materials and ultrathin semiconductor applications.