IEEE Transactions on Electron Devices | 2021
16 × 4 Linear Solar-Blind UV Photoconductive Detector Array Based on β-Ga2O3 Film
Abstract
In this article, a <inline-formula> <tex-math notation= LaTeX >$16\\times4$ </tex-math></inline-formula> linear array of <inline-formula> <tex-math notation= LaTeX >$\\beta $ </tex-math></inline-formula>-Ga<sub>2</sub>O<sub>3</sub>-based metal-semiconductor-metal structured photodetector is described for solar-blind sensing operation at a wavelength of 254 nm. The <inline-formula> <tex-math notation= LaTeX >$\\beta-\\mathrm{Ga}_{2} \\mathrm{O}_{3}$ </tex-math></inline-formula> film is grown by using metal-organic chemical vapor deposition (MOCVD) equipment, and the photodetectors are finished in constructing with standard photolithography and ion beam sputtering procedures. The results show that the dark current (<inline-formula> <tex-math notation= LaTeX >${\\mathrm {I}}_{{dark }}$ </tex-math></inline-formula>), photo-to-dark current ratio (PDCR), photo responsivity (R), specific detectivity <inline-formula> <tex-math notation= LaTeX >$\\left(D^{*}\\right)$ </tex-math></inline-formula>, exterl quantum efficiency (EQE), and linear dynamic region (LDR) are 1.94 pA, <inline-formula> <tex-math notation= LaTeX >$2.95 \\times 10^{7}$ </tex-math></inline-formula>, 139.56 A/W, <inline-formula> <tex-math notation= LaTeX >$2.55 \\times 10^{15}$ </tex-math></inline-formula> Jones, <inline-formula> <tex-math notation= LaTeX >$6.8 \\times 10^{4 \\%}$ </tex-math></inline-formula>, and 149.4 dB, at 10 V bias and <inline-formula> <tex-math notation= LaTeX >$2000 \\mu \\mathrm{W} / \\mathrm{cm}^{2}$ </tex-math></inline-formula> light intensity illumination. In addition, the standard deviation of <inline-formula> <tex-math notation= LaTeX >$R$ </tex-math></inline-formula> for this photodetector array is 10%. Overall, such a <inline-formula> <tex-math notation= LaTeX >$16 \\times 4$ </tex-math></inline-formula> linear array of <inline-formula> <tex-math notation= LaTeX >$\\beta-\\mathrm{Ga}_{2} \\mathrm{O}_{3}$ </tex-math></inline-formula>-based photodetector array makes a progress in the field of Ga<sub>2</sub>O<sub>3</sub> photodetectors.