Performance Analysis of Optical MEMS Based Pressure Sensor Using Ring Resonators Structure on Circular Diaphragm

Abstract

Proposed work here consists of Micro Opto Electro Mechanical System based pressure sensor integrated with ring resonators. Single, double and triple ring resonators are integrated with photonic crystal sensing layer have been investigated for different sensitivity and minimum detectability by coupling FEA modelling with optical system. Photonic crystal sensing layer is modelled using Ansys Multiphysics for modelling and analysis. For applied pressure in the range of 1Mpa to 6Mpa, deformation and Maximum stress developed in different direction is calculated. Influence of mechanical deformation and stress developed during application of pressure for peak resonance wavelength shift is explored for each combination of ring resonators. Minimum observable deformation of $1.0073\\mu \\mathrm{m}$ for single ring resonator at pressure of $6.3\\mu \\mathrm{Pa}$. Deformation of $1.051\\mu \\mathrm{m}$ for double ring resonator at pressure of $6.5\\ \\mu \\mathrm{Pa}$ and $1.009\\ \\mu \\mathrm{m}$ deformation for triple ring resonator at pressure of $6.9\\ \\mu \\mathrm{Pa}$ is detected. Maximum sensitivity of 450nm/RIU and Quality factor of 12,245 is observed for single ring resonator. Proposed type of sensor investigation having remarkable application in biomedical instruments with appropriate design.