Design of SoC for Special Measurement and Control of MEMS Gyroscope Based on ARM Cortex-M3

Abstract

MEMS gyroscope had the advantages of small volume, light weight, low cost, high reliability, easy digitization, mass production, etc. High-precision MEMS gyroscope should be applied near the resonance frequency in order to overcome the interference of process, environmental noise, etc. on measurement, and it is necessary to design gyro detection circuit and drive circuit. The resonant MEMS gyroscope designed and developed by our research group independently was regarded as the research object in the paper. The MEMS gyroscope closed-loop control digital ASIC circuit based on Crotex-M3 core was designed, thereby achieving small coverage area and excellent algorithm scalability. The overall design and simulation verification of the digital measurement and control circuit were completed.