Spectrally-resolved white-light phase-shifted interferometry for 3D measurements of multilayer films

Abstract

As a summary of of the authors previous paper of Ref 1, we describe a new scheme of a Linnik interferometric configuration based on spectrally-resolved white-light interferometry for simultaneous measurement of top surface and its underlying film surfaces in multilayer film structure. Our proposed technique enables accurate measurements of the phase and reflectance over a large range of wavelengths using the iterative least-squares phase-shifting algorithm by suppressing critical phase shift errors, and it provides a better measurement result than conventional methods. To verify our method a complex multilayer film was prepared and we measured it, and compared with well-known conventional techniques. Comparison results show our new method successfully works well with high precision as same as existing methods.