New generation TruMicro series 2000: micromachining versatility by GHz-burst, higher average power, flexible pulse on demand and integrated hollow-core fiber interface

Abstract

Ultrashort pulse micromachining has found a rising number of applications in a variety of scientific and industrial fields. In order to address the growing field of applications, target materials and customer requirements, a high degree of pulse parameter flexibility and ease of integration is needed. The newest generation of the TruMicro Series 2000 delivers unique features such as fast tunable pulse duration, MHz- up to GHz-burst modes in combination with flexible Pulse on Demand and elevated average power of 100W for improved productivity scaling. Three available wavelengths (343nm, 515nm, 1030nm), an integrated hollow-core fiber interface, as well as a new advanced ultrashort pulse laser control, all combined into a new one box optomechanical design with identical interfaces and dimensions opens new paths for cutting-edge applications. The improved flexibility enables fast (<800ms) and controlled (without affecting beam pointing or energy stability) tuning of pulse parameters such as pulse duration, pulse energy, pulse frequency, QCW-mode and pulse spacing up to GHz-bursts (patent pending technology). Inter- as well as intra-process parameter switching offers advanced successive parameter sequences for tailored machining. Combined processes are demonstrated that optimize both productivity (ablation rate) and quality (surface roughness, color, gloss etc.) for ablation of various metals, semiconductors and ceramics by choosing suitable timescales for energy deposition. Automated parameter studies are shown to quickly generate quantitative surface quality characteristics and foster in-depth process understanding depending on pulse parameters. Furthermore, the latest benefits for ultrafast processing employing position synchronized output and the integrated hollow-core fiber delivery with TruMicro Series 2000 are demonstrated.