Large-area, high-resolution atomic layer deposited microchannel plates for UV imaging and particle identification in space science applications

Abstract

Incom Inc. is developing and commercializing microchannel plate (MCP) electron multiplier devices made from leadfree glass capillary array (GCA) substrates that are functionalized using atomic layer deposition (ALD) thin film coating technology. Notable benefits over conventional lead-oxide based MCP technology are larger MCP size, high and stable gain, low dark counts and gamma-ray sensitivity, improved mechanical and thermal stability, and the unique ability to tune the MCP resistance and electron amplification characteristics over a much wider range and independently from the glass substrate. Incom now routinely produces ALD-GCA-MCPs with 10 and 20 \uf06dm pore size at MCP dimensions up to 20 cm x 20 cm. ALD-GCA-MCPs are used for photon counting and charged particle detection in analytical instruments, high energy physics, nuclear physics, and space science applications. For future astronomical applications such as LUVOIR, HabEx, and CETUS, large-area, high-performance MCP electron amplifiers are paired with high-performance cross-strip readout systems and integrated into large format (≥ 50 mm sq.) photodetectors operating in the UV and optical regimes. Incom’s large area ALD-MCP-GCA technology is critical for realizing such large format photodetectors. In this paper, we provide a brief update on recent developments addressing the quality of the glass substrate as well as the thermal stability of the MCPs.