ZnO-Based Transparent Conductive Layers Obtained by the Magnetron Sputtering of a Composite Cermet ZnO:Ga–Zn Target: Part 2

Abstract

Abstract The influence of oxygen in the working gas on the deposition process, microstructure, and functional properties of transparent conductive ZnO:Ga layers obtained by the magnetron sputtering of a composite ZnO:Ga–Zn cermet target is investigated. It is shown that a relative excess of the zinc content in the reagent flux decreases with an increase in the oxygen content and the observed changes in the microstructure and the electrical and optical properties of the ZnO:Ga layers are due to a decrease in the oxygen deficit in them. The efficiency of using atomized cermet target material generally increases as the oxygen content in the working chamber increases. However, transparent conductive ZnO:Ga layers with a specific conductivity of σ > 10 3 Ohm –1 cm –1 acceptable for practical use were obtained at an oxygen content of less than 3%.