Surface Morphology, Microstructure, and Piezoelectric Response of Perovskite Islands in Lead Zirconate Titanate Thin Films

Abstract

Features of the microstructure and piezoelectric response of perovskite islands in a pyrochlore phase matrix in lead zirconate titanate thin films prepeared by the radio-frequency magnetron sputtering method are investigated. The radial inhomogeneity of the surface morphology and piezoresponse of the islands are revealed. The role of two-dimensional mechanical stresses acting on the thin film from the silicon substrate side is discussed.