Effect of solid–gas damping on dynamic characteristics of aerostatic guideway

Abstract

In order to study the influence mechanism of the motion accuracy of the air static pressure guide system, this article combines the internal transmission law of the driving part of the table and the coupling analysis of solid damping and micro-scale gas damping and establishes the stepping motor, ball screw, nut, and motion table. The four-degree-of-freedom operation model was used to study the response simulation and dynamic characteristics of the entire table under the influence of various components. Combined with the damping characteristics extracted from the experiment, the influence mechanism of micro-gap solids and gas damping on the motion accuracy of the air-floating table is analyzed, and the optimal structural scheme that can effectively improve the accuracy and stability is proposed to improve the performance of the air-floating table and ultra-precision machine tools, processing accuracy to solve key technical problems in improving nano-machining accuracy.