Salisbury screen optical color filter with ultra-thin titanium nitride film.

Abstract

Titanium nitride (TiN) is a metal-like refractory material that can be used as a substitution for metals in many applications. In this paper, we report the use of an ultra-thin TiN film in the Salisbury screen structure to spectral selectively absorb visible light for forming an optical color filter. The ultra-thin TiN film functions as a partial reflector as well as a protection capping layer in the structure. Spectral selective perfect absorption color filters with TiN-ZnO-Al multilayer films were fabricated and characterized.