Ultra-compact electrically controlled beam steering chip based on coherently coupled VCSEL array directly integrated with optical phased array.

Abstract

Beam steering devices have wide applications in both military and civil fields. The ultimate goal for such devices is to reduce their size, weight, and power consumption. However, the laser source in these devices is spatially separate from the phase shifter, resulting in large size, complex packaging, and low coupling efficiency. To solve these problems, a novel electrically controlled beam steering chip based on coherently coupled vertical cavity surface emitting laser (VCSEL) array directly integrated with liquid crystal optical phased array (LCOPA) is proposed in this paper. Implant-defined in-phase coherently coupled VCSEL arrays (CCVAs) with uniform near-field are designed and fabricated first to act as the coherent laser source for the chip. Then, taking advantage of the CCVA planar structure, the LCOPA is integrated directly on the CCVA by conventional process. The coherent light generated by the in-phase CCVA is uniformly and normally incident into the LCOPA and is electrically steered by the LCOPA. One-dimensional beam steering is achieved by two proof-of-concept integrated chips. The chips based on a 4 × 4 square CCVA and a 16-element hexagonal CCVA offer a field of view of 2.21° and 6.06°, respectively. Independent control of the CCVA and LCOPA guarantees a relatively high wavelength stability and power stability. Theoretical calculations are also performed, which are consistent with the experiments.