Compression-coding-based surface measurement using a digital micromirror device and heterodyne interferometry of an optical frequency comb.

Abstract

We propose a compression-coding-based surface measurement method that combines single-pixel imaging and heterodyne interference using an optical frequency comb. The real and imaginary parts of the heterodyne interference signals are used to obtain the depth information rapidly. By optimizing the ordering of the Hadamard measurement basis, we reconstruct a three-step sample with heights of approximately 10, 20, and 30 µm without an iterative operation in 6\u2005ms, with a precision of 5\u2005nm. Compared with the uncompressed measurement, the sampling times reduced to 20%, and the measurement time reduced by five times without measurement accuracy loss. The proposed method is effective for rapid measurements, particularly for objects with a simple surface topography.