High-speed Silicon Mach-Zehnder Modulator with Corrugated Waveguides for Data Center Interconnects

Abstract

An energy-efficient integrated silicon Mach-Zehnder modulator using 0.5 mm long corrugated waveguides with an extinction ratio of 30 dB is presented. Using this modulator, 15 Gb/s NRZ transmission is demonstrated with modulation efficiency (Vπ L) of 0.065 V.cm.