2019 12th German Microwave Conference (GeMiC) | 2019
1 kW 13.56 MHz Class-D−1 Power Stage with 90 % Drain Efficiency
Abstract
This work describes the design and implementation of a highly efficient, low-cost 13.56 MHz, 1-kW RF solid-state power stage for RF plasma and heating applications. The prototype achieves more than 1 kW RF output power with a drain efficiency of 90 %.