Mechanisms and Characteristics of Large-Area High-Current-Density 4H-SiC Trench Junction Barrier Schottky Diodes

Abstract

Mechanisms and characteristics of optimized main junction for 4H-SiC trench junction barrier Schottky (TMJBS) diodes were investigated by theories and experiments. From these simulation and experimental values, we can conclude that TMJBS device has better reverse performance, such as the best reverse blocking capability and lowest reverse surface leakage current than the conventional JBS and TJBS device while maintaining good forward characteristics. Furthermore, The large area TMJBS Diodes with high current density show the better reverse characteristics than the small area one at an acceptable forward characteristics. The TMJBS structure can significantly reduce the influence of the Schottky interface and is more suitable for manufacturing high current density and large area devices.