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Akihiro Hosokawa

Applied Materials

Publication

Featured researches published by Akihiro Hosokawa.

Archive | 2005

Electron beam welding of sputtering target tiles

Yoshiaki Tanase; Akihiro Hosokawa

Archive | 1998

Automated substrate processing systems and methods

Akihiro Hosokawa; Richard E. Demaray; Makoto Inagawa; Ravi B. Mullapudi; Harlan L. Halsey; Michael T. Starr

Archive | 1995

Shielded heat sensor for measuring temperature

Akihiro Hosokawa; Masahiko Kowaka

Archive | 2002

Apparatus and method for uniform substrate heating and contaminate collection

Sam H. Kim; Akihiro Hosokawa; Dong Choon Suh

Archive | 2001

High performance magnetron for DC sputtering systems

Akihiro Hosokawa; Ravi B. Mullapudi

Archive | 2005

Integrated PVD system using designated PVD chambers

Akihiro Hosokawa; Makoto Inagawa; Hien-Minh Huu Le; John M. White

Archive | 2005

Large-area magnetron sputtering chamber with individually controlled sputtering zones

Yan Ye; John M. White; Akihiro Hosokawa; Hien-Minh Huu Le

Archive | 2006

Reactive sputtering chamber with gas distribution tubes

John M. White; Yan Ye; Akihiro Hosokawa

Archive | 2007

Reactive sputtering zinc oxide transparent conductive oxides onto large area substrates

Yan Ye; Ankur Kadam; Yanping Li; Allen Lau; Makoto Inagawa; Bradley O. Stimson; Akihiro Hosokawa

Archive | 2004

Multiple section end effector assembly

Takayuki Matsumoto; Akihiro Hosokawa

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