A. G. Nikolaev

Simple and inexpensive time-of-flight charge-to-mass analyzer for ion beam source characterization

We describe the design, electronics, and test results of a simple and low-cost time-of-flight ion charge-to-mass analyzer that is suitable for ion source characterization. The method selects a short-time sample of the beam whose charge-to-mass composition is then separated according to ion velocity and detected by a remote Faraday cup. The analyzer is a detachable device that has been used for rapid analysis of charge-to-mass composition of ion beams accelerated by voltages of up to about 100kV.We describe the design, electronics, and test results of a simple and low-cost time-of-flight ion charge-to-mass analyzer that is suitable for ion source characterization. The method selects a short-time sample of the beam whose charge-to-mass composition is then separated according to ion velocity and detected by a remote Faraday cup. The analyzer is a detachable device that has been used for rapid analysis of charge-to-mass composition of ion beams accelerated by voltages of up to about 100kV.

The ‘‘TITAN’’ ion source

TITAN is a new type of ion source capable of generating high current, wide aperture beams of gas and metal ions from a broad range of elements: Mg, Al, Ti, Cr, Fe, Co, Ni, Sm, Zn, W, Pb, Ta, Re, Y, C, He, N, Ar, and Xe. A specific feature of the TITAN ion source is the use of two kinds of arc discharges, each with cold cathodes, to produce plasma for ion beam extraction. Metal ions are generated by means of the vacuum arc in the metal vapor formed in cathode spots. Gas ions, on the other hand, are provided by a low‐pressure constricted arc discharge. In a pulsed mode of operation the extraction voltage of the source ranges from 10 to 100 kV. The pulsed beam current for gas and metal ions is on the order of 1 A at pulse repetition rates up to 50 pulses per second and pulse duration of ∼400 μs. For dc operation and at an extraction voltage up to 10 kV, the ion current is as high as hundreds of milliamperes. This work outlines briefly the ion source, its design, and certain physical peculiarities observed wh...

Measurements of the total ion flux from vacuum arc cathode spots

The ion current from different cathode materials was measured for 50-500 A of arc current. The ion current normalized by the arc current was found to depend on the cathode material, with values in the range from 5% to 19%. The normalized ion current was generally greater for elements of low cohesive energy. The ion erosion rates were determined from values of ion current and ion charge states, which were previously measured in the same ion source. The absolute ion erosion rates ranged from 16-173 /spl mu/g/C.

The 100‐kV gas and metal ion source for high current ion implantation

The TITAN ion source is a new kind of source which can produce high current beams of both metal and gas ions simultaneously or separately. Ion beams of the elements Mg, Al, Ti, Ca, Cr, Fe, Co, Ni, Zn, Sn, Ta, Re, Y, C, He, N, Ar, and Xe have been generated. To obtain metal ions a vacuum arc is used in metal vapors created in ‘‘cathode spots.’’ To obtain gas ions a contragated arc discharge in gas current is used. The source extraction voltage is controlled within 10–100 kV. The ion current of both gas and metal was ≂1 A. The source operates in a frequency‐pulse regime at a pulse‐repetition frequency as high as 50 pps. At its normal operation the source provides a dose of 1016 ions/cm2 per minute on a 250‐cm2 area surface. The source is constructed according to the program on development of new technologies and is intended for high current surface modification and production of exotic surface alloys. At present, TITAN ion sources are utilized to modify physical‐mechanical parameters of different surfaces. ...

Ion charge state distributions of pulsed vacuum arc plasmas in strong magnetic fields

Vacuum arc plasmas with discharge currents of 300 A and duration 250 μs have been produced in strong magnetic fields up to 4 T. Ion charge state distributions have been measured for C, Al, Ag, Ta, Pt, Ho, and Er with a time-of-flight charge-mass-spectrometer. Our previous measurements have been confirmed which show that ion charge states can be considerably enhanced when increasing the magnetic field up to about 1 T. The new measurements address the question of whether or not the additional increase continues at even higher magnetic field strength. It has been found that the increase becomes insignificant for field strengths greater than 1 T. Ion charge state distributions are almost constant for magnetic field strengths between 2 and 4 T. The results are explained by comparing the free expansion length with the freezing length. The most significant changes of charge state distributions are observed when these lengths are similar.

Multiple ionization of metal ions by ECR heating of electrons in vacuum arc plasmas

A joint research and development effort has been initiated, whose ultimate goal is the enhancement of the mean ion charge states in vacuum arc metal plasmas by a combination of a vacuum arc discharge and electron cyclotron resonance (ECR) heating. Metal plasma was generated by a special vacuum arc mini-gun. Plasma was pumped by high frequency gyrotron-generated microwave radiation. The results have demonstrated substantial multiple ionization of metal ions. For a lead plasma, ECR heating increased the maximum attainable ion charge state from Pb2+ up to Pb6+. The confinement parameter was as high as ∼109 cm−3 s. Further increase of the ion charge states will be attained by increasing the vacuum arc plasma density and optimizing the ECR heating conditions.

Study of directed ion velocities in a vacuum arc by an emission method

Directed ion velocities in a vacuum arc discharge plasma are measured on the basis of a study of the ion emission current response to a rapid change of arc current. It is shown that these velocities are about 106 cm/s, are determined by the cathode material, and are almost independent of the ion charge number. Applying a magnetic field results in an increase in the directed ion velocity. As the gas pressure increases, the directed ion velocity decreases; this is the only case where the directed velocities are observed to depend on the ion charge number.

Generation of multicomponent ion beams by a vacuum arc ion source with compound cathode

This paper presents the results of time-of-flight mass spectrometry studies of the elemental and mass-to-charge state compositions of metal ion beams produced by a vacuum arc ion source with compound cathode (WC-Co(0.5), Cu-Cr(0.25), Ti-Cu(0.1)). We found that the ion beam composition agrees well with the stoichiometric composition of the cathode material from which the beam is derived, and the maximum ion charge state of the different plasma components is determined by the ionization capability of electrons within the cathode spot plasma, which is common to all components. The beam mass-to-charge state spectrum from a compound cathode features a greater fraction of multiply charged ions for those materials with lower electron temperature in the vacuum arc cathode spot, and a smaller fraction for those with higher electron temperature within the spot. We propose a potential diagram method for determination of attainable ion charge states for all components of the compound cathodes.

Vacuum arc trigger systems based on E×B discharges

Triggering systems for vacuum arc plasma sources and ion sources have been developed that make use of a gaseous trigger discharge in a strong magnetic field. Two kinds of trigger discharge configurations have been explored, a Penning discharge and a magnetron discharge. The approach works reliably for low gas pressure in the vacuum arc environment and for long periods of operation between required maintenance: pressures in the mid‐10−6 Torr range and for ≳106 pulses.

Charge-state distribution of ions in a vacuum arc discharge plasma in a high magnetic field

It is shown that the fraction of multiply charged metal ions generated in a vacuum arc discharge plasma grows substantially in a high magnetic field. This effect was observed for more than 30 different cathode materials. A relation is established between growth of the mean charge of the ions and increases in the burning voltage of the arc. It is demonstrated that the burning voltage of the vacuum arc can be ultimately increased to 160 V.