A. Koudymov

Si3N4/AlGaN/GaN–metal–insulator–semiconductor heterostructure field–effect transistors

We report on a metal–insulator–semiconductor heterostructure field-effect transistor (MISHFET) using Si3N4 film simultaneously for channel passivation and as a gate insulator. This design results in increased radio-frequency (rf) powers by reduction of the current collapse and it reduces the gate leakage currents by four orders of magnitude. A MISHFET room temperature gate current of about 90 pA/mm increases to only 1000 pA/mm at ambient temperature as high as 300 °C. Pulsed measurements show that unlike metal–oxide–semiconductor HFETs and regular HFETs, in a Si3N4 MISHFET, the gate voltage amplitude required for current collapse is much higher than the threshold voltage. Therefore, it exhibits significantly reduced rf current collapse.

The 1.6-kV AlGaN/GaN HFETs

The breakdown voltages in unpassivated nonfield-plated AlGaN/GaN HFETs on sapphire substrates were studied. These studies reveal that the breakdown is limited by the surface flashover rather than by the AlGaN/GaN channel. After elimination of the surface flashover in air, the breakdown voltage scaled linearly with the gate-drain spacing reaching 1.6 kV at 20 mum. The corresponding static ON-resistance was as low as 3.4 mOmegamiddotcm². This translates to a power device figure-of-merit V_BR ²/R_ON=7.5times10⁸ V²middotOmega^-1 cm^-2, which, to date, is among the best reported values for an AlGaN/GaN HFET

Induced strain mechanism of current collapse in AlGaN/GaN heterostructure field-effect transistors

Gated transmission line model pattern measurements of the transient current–voltage characteristics of AlGaN/GaN heterostructure field-effect transistors (HFETs) and metal–oxide–semiconductor HFETs were made to develop a phenomenological model for current collapse. Our measurements show that, under pulsed gate bias, the current collapse results from increased source–gate and gate–drain resistances but not from the channel resistance under the gate. We propose a model linking this increase in series resistances (and, therefore, the current collapse) to a decrease in piezoelectric charge resulting from the gate bias-induced nonuniform strain in the AlGaN barrier layer.

AlGaN/InGaN/GaN Double Heterostructure Field-Effect Transistor

Novel, current collapse free, double heterostructure AlGaN/InGaN/GaN field effect transistors (DHFETs) are fabricated on the insulating SiC substrates. The simulations show that a combined effect of the bandgap offsets and polarization charges provides an excellent 2D carrier confinement. These devices demonstrate output RF powers as high as 4.3 W/mm in CW mode and 6.3 W/mm in the pulsed mode, with the gain compression as low as 4 dB.

SiO/sub 2//AlGaN/InGaN/GaN MOSDHFETs

The characteristics of a novel nitride based field-effect transistor combining SiO/sub 2/ gate isolation and an AlGaN/InGaN/GaN double heterostructure design (MOSDHFET) are reported. The double heterostructure design with InGaN channel layer significantly improves confinement of the two-dimensional (2-D) electron gas and compensates strain modulation in AlGaN barrier resulting from the gate voltage modulations. These decrease the total trapped charge and hence the current collapse. The combination of the SiO/sub 2/ gate isolation and improved carrier confinement/strain management results in current collapse free MOSDHFET devices with gate leakage currents about four orders of magnitude lower than those of conventional Schottky gate HFETs.

Mechanism of radio-frequency current collapse in GaN–AlGaN field-effect transistors

The mechanism of radio-frequency current collapse in GaN–AlGaN heterojunction field-effect transistors (HFETs) was investigated using a comparative study of HFET and metal–oxide–semiconductor HFET current–voltage (I–V) and transfer characteristics under dc and short-pulsed voltage biasing. Significant current collapse occurs when the gate voltage is pulsed, whereas under drain pulsing the I–V curves are close to those in steady-state conditions. Contrary to previous reports, we conclude that the transverse electric field across the wide-band-gap barrier layer separating the gate and the channel rather than the gate or surface leakage currents or high-field effects in the gate–drain spacing is responsible for the current collapse. We find that the microwave power degradation in GaN–AlGaN HFETs can be explained by the difference between dc and pulsed I–V characteristics.

Insulating gate III-N heterostructure field-effect transistors for high-power microwave and switching applications

Describes the properties of novel III-N-based insulating gate heterostructure field-effect transistors (HFETs). For the gate isolation, these devices use either SiO/sub 2/ layer (in metal-oxide-semiconductor HFET (MOSHFET) structures) or Si/sub 3/N/sub 4/ layer (in metal-insulator-semiconductor HFET structures). These insulating gate HFETs have the gate-leakage currents 4-6 orders of magnitude lower than HFETs, even at elevated temperatures up to 300/spl deg/C. A double-heterostructure MOSHFET with SiO/sub 2/ gate isolation exhibits current collapse-free performance with extremely low gate-leakage current. Insulating gate devices, including large periphery multigate structures, demonstrate high-power stable operation and might find applications in high-performance power amplifiers and microwave and high-power switches with operating temperatures up to 300/spl deg/C or even higher.

Submicron gate Si 3 N 4 /AlGaN/GaN-metal-insulator-semiconductor heterostructure field-effect transistors

We present the characteristics of a quarter-micron gate metal-insulator-semiconductor heterostructure field-effect transistor (MISHFET) with Si/sub 3/N/sub 4/ film as a gate insulator. A detailed comparison of the MISHFET and an identical geometry HFET shows them to have the same radio frequency (RF) power gain and cut-off frequency, while the MISHFET has much lower gate-leakage currents and higher RF powers at operating frequencies as high as 26 GHz. The MISHFET gate-leakage currents are well below 100 pA at gate bias values from -10 V to +8 V. At zero gate bias, the drain saturation current is about 0.9 A/mm and it increases to 1.2 A/mm at +8 V gate bias. The output RF power of around 6 W/mm at 40 drain bias was found to be frequency independent in the range of 2 to 26 GHz. This power is 3 dB higher than that from HFET of the same geometry. The intrinsic cutoff frequency is /spl sim/63 GHz for both the HFET and the MISHFET. This corresponds to an average effective electron velocity in the MISHFET channel of 9.9/spl times/10/sup 6/ cm/s. The knee voltage and current saturation mechanisms in submicron MISHFETs and heterostructure field-effect transistors (HFET) are also discussed.

Stable CW operation of field-plated GaN-AlGaN MOSHFETs at 19 W/mm

We report for the first time the dc and radio frequency (RF) operation of a field-plated GaN-AlGaN metal-oxide-semiconductor heterostructure field effect transistor (MOSHFET). At 2 GHz and an RF output power level of 19 W/mm (drain bias 55 V), the device exhibited a remarkably stable operation for times in excess of 100 h. In contrast, a similar geometry HFET from the same wafer continuously degraded from 17 W/mm down to 14 W/mm within the first 20 h. We attribute the stable performance of the MOSHFET at high microwave powers to the extremely low gate-leakage currents and the current collapse-free operation resulting from the field-plated design.

AlGaN/GaN/AlGaN Double Heterostructure for High-Power III-N Field-Effect Transistors

We propose and demonstrate an AlGaN/GaN/AlGaN double heterostructure (DH) with significantly improved two-dimensional (2D) confinement for high-power III-N heterostructure field-effect transistors (HFETs). The DH was grown directly on an AlN buffer over i-SiC substrate. It enables an excellent confinement of the 2D gas and also does not suffer from the parasitic channel formation as experienced in past designs grown over GaN buffer layers. Elimination of the GaN buffer modifies the strain distribution in the DH, enabling Al contents in the barrier region well over 30%. For the AlGaN/GaN/AlGaN DH design, the 2D electron gas mobility achieved was 1150 cm2/V s at room temperature and 3400 cm2/V s at 77 K, whereas the temperature independent sheet carrier density was NS≈1.1×1013 cm−2. Compared to a regular AlGaN/GaN structure, the channel mobility-concentration profiling shows significant improvement in the carrier confinement. Sample DHFETs with 1-μm long gates demonstrate the threshold voltage of 3.5 V, wit...