A. Lorusso

A study of the parameters of particles ejected from a laser plasma

We report on the results concerning the characteristics and the behavior of expanding plasma generated by a Laser Ion Source ~LIS!. The LIS technique is an efficient means in producing of multi-charged ions utilizing pulsed laser beams. In order to extract Cu ions, in this experiment an XeCl excimer UV laser was employed, providing a power density on the target surface up to 5 3 10 8 W0cm 2 . Two typologies of diagnostic systems were developed in order to detect the plasma current and the ion energy. The time-of-flight ~TOF! measurements were performed exploiting either a Faraday cup or an Ion Energy Analyzer ~IEA!. This latter allowed getting quantitative information about the relative ion abundances, their kinetic energy and their charge state. To study the plasma characteristics we measured the total etched material per pulse at 70 mJ. It was 0.235 mg and the overall degree of ionization, 16%. The angular distribution of the ablated material was monitored by optical transmission analysis of the deposited film as a function of the angle with respect to the normal to the target surface. Applying a high voltage to an extraction gap a multi-charged ion beam was obtained; different peaks could be distinguished in the TOF spectrum, resulting from the separation of ions of hydrogen, adsorbed compounds in the target and copper.

Characterization of a nonequilibrium XeCl laser-plasma by a movable Faraday cup

In this work the experimental results of a nonequilibrium laser-plasma induced by an ultraviolet 308 nm excimer laser are reported. All measurements were performed fixing the laser energy at 70 mJ. It was concentrated on a 0.0099 cm2 spot by a convergent focal lens of 15 cm focal length. The utilized target was a 99.99% pure Cu disk. An 8 cm in diameter movable Faraday cup was developed in order to detect the plasma flow pulse at different positions along a drift tube. Analyzing the time-of-flight pulse under different cup bias voltage, we were able to distinguish the electron pulse, the suprathermal ions, and the thermal evolution of the plasma. In addition, by applying a breakdown voltage as polarizing cup voltage, we characterized the duration of the neutral component. To determine the system particle production efficiency, the total etched material per pulse, 0.235 μg, and the fractional ionization were measured. The expelled particle flux distribution was measured by an optical transmission analysis ...

Charge losses in expanding plasma created by an XeCl laser

The emission of multiply charged Cuq+ ions from a plasma produced by 308 nm excimer laser is analyzed with respect to the distance from the irradiated target. The critical zone, outside which the charge states of ions of the expanding plasma are frozen, was determined to be approximately 20 cm from the target. This value was estimated using a charge-freezing criterion expressed by a distance dependence of the total charge carried by the ions Q∝L−2, which describes the dilution of plasma by its expansion into a vacuum without collisional recombination processes.

Time-of-flight profile of multiply-charged ion currents produced by a pulse laser

The ion emission from a Cu-plasma produced by a 308 nm excimer laser is analysed by time-of-flight spectroscopy and by deconvolution of measured ion currents. The ion current signals recorded by an ion collector outside the critical zone, where the charge-states of ions of the expanding plasma are frozen, have been deconvoluted by the use of the Kelly and Dreyfus equation. The meaningful recovered currents recorded for Cu+ and Cu2+ ions have been compared with the current signals reconstructed from the ion energy analyser spectra. A velocity distribution and the abundance of the above ions are presented. A time-resolved average charge-state of ions is also determined. The application of the law Q ∝ l−2, based on the dilution of the total charge, Q, carried out by ions at long distances, l, from the target, is shown to be fundamental for a characterization of the laser-produced plasma.

Overcoming pulse mixing and signal tailing in laser ablation inductively coupled plasma mass spectrometry depth profiling

The laser ablation-induced plasma was used as a composition-controlled source for ion implantation in Si crystals. Then, laser ablation in combination with inductively coupled plasma mass spectrometry was used for the elemental depth profiling of the implanted samples. Monte Carlo simulations permitted us to conclude that a depth resolution of tens of nm would be necessary to define the shape of the implantation profiles, as is obtained using XPS and RBS, whereas a hundred nm depth resolution is sufficient to determine the total implanted dose. The detection power of LA-ICP-MS would routinely allow rapid analytical control on the trace level implanted dose. Nevertheless, this technique is limited in terms of depth profiling resolution due to pulse mixing and signal tailing induced during the aerosol transport. Raw signal processing procedures were developed for the minimization of shapeline dispersion, deconvolution of pulse mixing and more appropriate assessment of the implanted profiles. Shapeline dispersion could be corrected for by determining the signal waning constant and implementing this information for a non-affine alibi transformation of the LA-ICP-MS signal traces. Pulse mixing deconvolution was attained with an algorithm that considered accumulated signal intensity due to pulse-on-pulse stacking, i.e., the latest pulse on top of all antecedent individual pulses’ exponential tails proportionally.

Y thin films grown by pulsed laser ablation

The effects of laser fluence on the growth characteristics and surface morphology of yttrium films grown by pulsed laser deposition are investigated. The presence of droplets in the deposited films, which is the main drawback of pulsed laser deposition technique, was studied at different laser fluences. The morphology and the structure of the grown films were studied by scanning-electron microscopy and x-ray diffraction, respectively. Careful scanning-electron microscope investigations obtained by tilting the samples show that the droplets arrive to the substrate in the molten phase. The ablation rate measured at five different laser fluences (0.9–7.6 J/cm2) shows a nonlinear trend correlated with the presence of the plasma-shielding effect. The present interest in the deposition of yttrium thin films by laser ablation is due to the well-known photoemission characteristics of this metal. Depositing good-quality thin films with high adhension and low droplet density will improve the performance of photocat...

Simulation of emission spectra from nonuniform reactive laser-induced plasmas.

We demonstrate that chemical reactions leading to the formation of AlO radicals in plasmas produced by ablation of aluminum or Ti-sapphire with ultraviolet nanosecond laser pulses can be predicted by the model of local thermodynamic equilibrium. Therefore, emission spectra recorded with an echelle spectrometer and a gated detector were compared to the spectral radiance computed for uniform and nonuniform equilibrium plasmas. The calculations are based on analytical solutions of the radiation transfer equation. The simulations show that the plasmas produced in argon background gas are almost uniform, whereas temperature and density gradients are evidenced in air. Furthermore, chemical reactions exclusively occur in the cold plume periphery for ablation in air. The formation of AlO is negligible in argon as the plasma temperature is too large in the time interval of interest up to several microseconds. Finally, the validity of local thermodynamic equilibrium is shown to depend on time, space, and on the elemental composition. The presented conclusions are of interest for material analysis via laser-induced breakdown spectroscopy and for laser materials processing.

Study of particle acceleration of Cu plasma

The experimental results of particle acceleration by plasma generated using a XeCl laser are described. The laser ion source developed is able to accelerate specific particles and to overcome the plasma effects which occur specially during the application of the accelerating voltage. In order to successfully execute this experiment, plasma expansion was highly necessary before the accelerating voltage application. For this goal an almost hermetic expanding chamber with a hole at its end, used as extraction electrode, was made. In this way arcs were eliminated and specific particles propagate in the drift tube. Time-of-flight and current intensity measurements of the ion beam have been done. The output signal, measured at 147 cm from the target, resulted modulated on ion mass-to-charge ratio and its maximum current was 220 μA at 18 kV accelerating voltage. Under the same accelerating value the bunch charge was estimated to be 4.2 nC.

Revealing of hydrodynamic and electrostatic factors in the center-of-mass velocity of an expanding plasma generated by pulsed laser ablation

Time-of-flight spectra of C, Fe, and Si ions produced with the use of a KrF excimer laser have been analyzed. Ion currents were collected by Faraday cups and their responses were analyzed using a detector signal function. This function was derived from shifted Maxwell-Boltzmann velocity distribution, in order to uncover the contribution of partial currents of all the ionized species constituting the expanding plasma plume. The deconvolution method allowed to estimate parameters of the plasma, such as the ion temperature and the center-of-mass velocities of expanding ionized species. Furthermore, the linear charge-state dependence of the center-of-mass velocity has revealed the contribution of hydrodynamic and electrostatic forces to the expansion velocity of the plasma. The nearly isotropic distribution of the center-of-mass velocity indicates that the shape of the plasma plume is determined mainly by the angular distribution of the ionization degree of ions.

Significant role of the recombination effects for a laser ion source

This study is devoted to characterizing a free expansion laser plasma produced by an excimer laser with respect to recombination phenomena. The plasma was ejected from a Cu target after the laser pulse. The diagnostic system was a Faraday cup located at different distances from the target in order to collect the ions carried by the plasma. Ion recombination effects were clearly observed at distances close to the target, due to the high density of the laser-produced plasma at the beginning of its expansion. The recombination range and critical distance were experimentally estimated measuring the ion charge variation on the distance from the target. Beyond it, the charge loss due to the recombination effects was negligible and the freezing of the charge states set in. In this region the plasma dilution, which was due to its free expansion into the vacuum, occurred, and the collected ion charge, Q, followed the law Q ∝ L−2 as a function of the distance from the target, L. The assessment of recombination processes is very important for the optimization of a laser ion source.