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Abe Haruhiko

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Publication

Featured researches published by Abe Haruhiko.

Archive | 1979

Plasma reaction apparatus

Abe Haruhiko; Denda Masahiko; Hirata Katsuhiro; Kinoshita Shigeji; Tsubouchi Natsuo; Harada Hirotsugu

Archive | 1977

METHOD AND APPARATUS FOR WASHING OF TREATING OBJECTS

Abe Haruhiko; Nishimoto Akira; Miyake Kuniaki; Takeda Yumiko

Archive | 1976

THE FORMATION OF SILICON DIOXIDE FILM

Abe Haruhiko; Nishimoto Akira; Miyake Kuniaki

Archive | 1980

FILM FORMING SYSTEM

Nishimoto Akira; Abe Haruhiko; Tsubouchi Natsuo; Miyoshi Hirokazu

Archive | 1979

FORMATION METHOD OF CONDUCTIVE REGION OF SEMICONDUCTOR DEVICE

Tsubouchi Natsuo; Abe Haruhiko; Nishimoto Akira; Miyoshi Hirokazu

Archive | 1977

VAPOR PHASE ETCHING DEVICE

Abe Haruhiko; Nishimoto Akira; Miyake Kuniaki; Takeda Yumiko

Archive | 1978

PREPARING METHOD FOR OXIDE FILM

Nishimoto Akira; Tsubouchi Natsuo; Takeda Yumiko; Abe Haruhiko; Miyoshi Hirokazu; Watari Yoshihiko

Archive | 1977

WASHING IN GAS PHASE

Abe Haruhiko; Nishimoto Akira; Miyake Kuniaki; Takeda Yumiko

Archive | 1977

DEVICE FOR GASEOUS PHASE ETCHING

Abe Haruhiko; Nishimoto Akira; Miyake Kuniaki; Takeda Yumiko

Archive | 1976

FORMATION PROCESS OF SILICON OXIDE FILM

Nishimoto Akira; Abe Haruhiko; Miyake Kuniaki

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