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Abe Tsukasa

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Publication

Featured researches published by Abe Tsukasa.

Archive | 2011

METHOD OF MANUFACTURING REFLECTIVE TYPE MASK

Abe Tsukasa; Inazuki Yuichi; Takigawa Tadahiko

Archive | 2011

METHOD FOR MANUFACTURING REFLECTIVE MASK AND REFLECTIVE MASK BLANK USED FOR THE MANUFACTURE

Abe Tsukasa; Inazuki Yuichi; Takigawa Tadahiko

Archive | 2011

REFLECTION TYPE MASK, AND METHOD OF REPAIRING THE SAME

Abe Tsukasa; Inazuki Yuichi; Takigawa Tadahiko

Archive | 2012

REFLECTIVE MASK AND MANUFACTURING METHOD OF THE SAME

Abe Tsukasa; Ogase Taichi; Inazuki Yuichi

Archive | 2012

REFLECTIVE MASK AND MANUFACTURING METHOD THEREFOR

Abe Tsukasa; Adachi Takashi; Akizuki Hideo; Takigawa Tadahiko

Archive | 2013

SUBSTRATE FOR REFLECTION TYPE MASK, REFLECTION TYPE MASK BLANK, REFLECTION TYPE MASK, AND MANUFACTURING METHODS OF THESE

Abe Tsukasa; Inazuki Yuichi; Ogase Taichi

Archive | 2012

REFLECTION TYPE MASK BLANK, REFLECTION TYPE MASK, METHOD OF MANUFACTURING REFLECTION TYPE MASK BLANK, AND METHOD OF MANUFACTURING REFLECTION TYPE MASK

Abe Tsukasa; Inazuki Yuichi; Kawashima Satoshi; Ogase Taichi

Archive | 2012

METHOD OF MANUFACTURING REFLECTIVE MASK BLANK HAVING PSEUDO PHASE DEFECT, AND METHOD OF MANUFACTURING REFLECTIVE MASK HAVING PSEUDO PHASE DEFECT

Abe Tsukasa; Takigawa Tadahiko; Ishikawa Mikio

Archive | 2012

REFLECTIVE MASK FOR EUV EXPOSURE AND METHOD FOR MANUFACTURING THE SAME

Abe Tsukasa; Inazuki Yuichi; Kawashima Satoshi; Ogase Taichi

Archive | 2011

REFLECTION-TYPE MASK BLANK, AND REFLECTION-TYPE MASK, AND MANUFACTURING METHOD AND INSPECTING METHOD THEREOF

Abe Tsukasa; Inazuki Yuichi; Takigawa Tadahiko

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