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Ad Leeuwestein

Philips

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Publication

Featured researches published by Ad Leeuwestein.

Proceedings of SPIE, 2004 vol. 5377 | 2004

Determination of resist parameters using the extended Nijboer-Zernike theory

Peter Dirksen; Jjm Braat; Ajem Guido Janssen; Ad Leeuwestein; Hans Kwinten; D Van Steenwinckel

Proceedings of SPIE, 2006 vol. 6154 | 2006

Aerial image based lens metrology for wafer steppers

Peter Dirksen; Jjm Braat; Ajem Guido Janssen; Ad Leeuwestein; T Matsuyama; T Noda

Proceedings of SPIE | 2005

Aberration retrieval for high-NA optical systems using the Extended Nijboer-Zernike theory

Peter Dirksen; Joseph J. M. Braat; Augustus J. E. M. Janssen; Ad Leeuwestein

Business History | 2005

Aberration retrieval for high-NA optical systems using the extended Nijboer-Zernike theory

Peter Dirksen; Joseph J. M. Braat; Augustus J. E. M. Janssen; Ad Leeuwestein

Business History | 2003

Experimental determination of lens aberrations from the intensity point-spread function in the focal region

Peter Dirksen; Joseph J. M. Braat; Augustus J. E. M. Janssen; Casper A. H. Juffermans; Ad Leeuwestein

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Peter Dirksen

Philips

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Augustus J. E. M. Janssen

Eindhoven University of Technology

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Joseph J. M. Braat

Delft University of Technology

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Ajem Guido Janssen

Delft University of Technology

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Jjm Braat

Delft University of Technology

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Casper A. H. Juffermans

Philips

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Hans Kwinten

Philips

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