Aernout Christiaan Zonnevylle

Deflection properties of an electrostatic electron lens with a shifted electrode

In this paper, the authors discuss a new electron optical component: an electrostatic lens in which one electrode is intentionally shifted laterally, breaking the rotational symmetry. This lens is called a “shift lens.” Usually, a shifted electrode is undesired, and the resulting aberrations are calculated only for the purpose of setting manufacturing requirements. However, the shift lens can be applied as a deflector. Thus, in multibeam systems with an individual microlens for each beam, all beams can be deflected with a single voltage. By giving a different shift to each lens, the deflection can be different for each beam. This allows the creation of a multibeam rotation error corrector. The optical properties of an electrostatic five-electrode lens with a shifted middle electrode are analyzed in this paper. For describing the optical properties of the shift lens, a simple mirror symmetric model in combination with Taylor polynomials is used. This model is then verified with a newly developed ray-tracin...

Positioning Pd catalyst particles for carbon nanotube growth using charge patterns created with a scanning electron microscope

Positioning of charged nanoparticles with the help of charge patterns in an insulator substrate is a known method. However, the creation of charge patterns with a scanning electron microscope for this is relatively new. Here a scanning electron microscope is used for the creation of localized charge patterns in an insulator, while a glowing wire generator is used as the nanoparticle source. The deposited palladium nanoparticles are used as catalysts for the localized growth of carbon nanotubes in a chemical vapor deposition oven. The authors show first the results on local carbon nanotube growth using this procedure.