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Aiuchi Susumu

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Publication

Featured researches published by Aiuchi Susumu.

Archive | 1995

PLASMA TREATMENT METHOD AND APPARATUS THEREFOR

Otsubo Toru; Aiuchi Susumu; Kamimura Takashi; Noguchi Minoru; Fujii Teru

Archive | 2001

METHOD AND DEVICE FOR EVALUATING SURFACE STATE OF POLISHING PAD, AND METHOD AND DEVICE FOR MANUFACTURING THIN-FILM DEVICE

Hirose Takeshi; Kojima Hiroyuki; Nomoto Mineo; Aiuchi Susumu

Archive | 1983

AUTOMATIC INSPECTING DEVICE

Aiuchi Susumu; Okamoto Keiichi; Nakahata Mitsuzou; Aoki Nobuhiko; Hara Yasuhiko; Nomoto Mineo

Archive | 1986

METHOD AND APPARATUS FOR MEASURING DEPTH OF FINE PATTERN

Noguchi Minoru; Otsubo Toru; Aiuchi Susumu

Archive | 1985

CONTROLLER FOR SUBSTRATE TEMPERATURE

Noguchi Minoru; Ootsubo Tooru; Aiuchi Susumu

Archive | 1985

METHOD OF MEASURING MINUTE DEPTH AND APPARATUS THEREFOR

Noguchi Minoru; Ootsubo Tooru; Aiuchi Susumu

Archive | 1983

TREATING DEVICE FOR PLASMA

Ootsubo Tooru; Aiuchi Susumu

Archive | 1981

CO2 LASER OSCILLATING DEVICE

Miyauchi Takeshi; Ikemoto Norio; Nemoto Kenichi; Karatsu Yoshinori; Aiuchi Susumu; Aoki Nobuhiko; Nakagawa Yasuo

Archive | 1984

CONVEYOR IN PLASMA TREATMENT DEVICE

Ootsubo Tooru; Aiuchi Susumu

Archive | 1983

AIR MICROMETER HAVING CORRECTOR

Aiuchi Susumu; Nomoto Mineo

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Nakagawa Yasuo

Hitachi

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Akiyama Nobuyuki

Hitachi

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Kembo Yukio

Hitachi

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