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Akihiro Goto

Nikon

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Publication

Featured researches published by Akihiro Goto.

Archive | 2000

Diffractive optical element, method of fabricating the element, illumination device provided with the element, projection exposure apparatus, exposure method, optical homogenizer, and method of fabricating the optical homogenizer

Akihiro Goto

Archive | 1999

Illuminator and projection aligner

Akihiro Goto; Nobumichi Kanayamatani; Osamu Tanitsu; Masato Shibuya; 明弘 後藤; 眞人 渋谷; 修 谷津; 信道 金山谷

Archive | 1995

Exposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniques

Akihiro Goto; Takashi Genma; Yutaka Ichihara; Nobutaka Magome; Naomasa Shiraishi; Toshio Matsuura; Hiroshi Shirasu; Masami Ebi

Archive | 1998

Electron beam type inspection device and method of making same

Muneki Hamashima; Akihiro Goto; Hiroshi Nishimura

Archive | 1997

Secondary battery and battery and equipment system utilizing the secondary battery

Hisashi Ando; Akihiro Goto; Tadashi Muranaka; Katsunori Nishimura; 寿 安藤; 明弘 後藤; 村中 廉; 勝憲 西村

Archive | 2004

Charged-particle-beam mapping projection-optical systems and methods for adjusting same

Hiroshi Nishimura; Naoto Kihara; Kinya Kato; Toru Takagi; Akihiro Goto; Junji Ikeda; Kazuya Okamoto

Archive | 1993

Exposure method and apparatus using holographic techniques

Akihiro Goto; Takashi Gemma; Yutaka Ichihara; Nobutaka Magome; Naomasa Shiraishi; Hiroshi Shirasu; Toshio Matsuura

Archive | 1999

Scanning device and scanning method

Yoshiaki Kohama; Akihiro Goto; Muneki Hamashima; Yukiharu Okubo

Archive | 1996

Battery assembly, and electromobile nd electronic equipment equipped with battery assembly

Hisashi Ando; Akihiro Goto; Hidetoshi Honbou; Michiko Igawa; Tadashi Muranaka; Katsunori Nishimura; 享子 井川; 壽 安藤; 明弘 後藤; 英利 本棒; 村中 廉; 勝憲 西村

Archive | 2000

Projection aligner and method of manufacturing micro device by using the same

Akihiro Goto; Shigeru Hirukawa; Masato Shibuya; 明弘 後藤; 眞人 渋谷; 茂 蛭川

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Hisashi Ando

Hitachi

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Katsunori Nishimura

Hitachi

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Muneki Hamashima

Nikon

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Toru Takagi

Nikon

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Yutaka Ichihara

Nikon

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Hiroshi Nishimura

Nikon

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Hiroshi Shirasu

Nikon

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Masato Shibuya

Nikon

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Naomasa Shiraishi

Nikon

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Nobutaka Magome

Nikon

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