Akihiro Goto

Diffractive optical element, method of fabricating the element, illumination device provided with the element, projection exposure apparatus, exposure method, optical homogenizer, and method of fabricating the optical homogenizer

Illuminator and projection aligner

Exposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniques

Electron beam type inspection device and method of making same

Secondary battery and battery and equipment system utilizing the secondary battery

Charged-particle-beam mapping projection-optical systems and methods for adjusting same

Exposure method and apparatus using holographic techniques

Scanning device and scanning method

Battery assembly, and electromobile nd electronic equipment equipped with battery assembly

Projection aligner and method of manufacturing micro device by using the same